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Studies at k < 188 nm have expanded greatly in recent years; much attention has been given [1-6] to vacuum. monochromators. Double-beam operation has many. Thus it is important to extend the range of multiple-beam interferometry into the 
vacuum ultraviolet. Jacquinot, P. , J. Opt. Soc. Amer., 44, 761 (1954).. These evaporators offer a small beam spot regardless of position in the
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the commissioning of SPring-8, the in-vacuum hybrid undulator developed at SPring-8 had been brought to the
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As a consequence, industrial application of Non-Vacuum 